3M氟化液FC-3283 

Introduction（產(chǎn)品簡介）

3M氟化液FC-3283是無色透明全氟化學品，具有良好的化學惰性、電氣絕緣性能、熱傳導性和第表面張力廣泛應用于半導體制造廠作為熱傳導介質(zhì)。其液體溫度范圍為-50°C 至128°C，主要應用于蝕刻設備、離子注入設備、測試設備及其他設備。因為FC-3283是單一組分，所以其成分不好出現(xiàn)降解或者過期。FC-3283沸點高，其隨時間的揮發(fā)也比較少。

3M Fluorinert Electronic Liquid FC-3283 is a clear, colorless, thermally stable,fully-?uorinated liquid ideal for use in many single phase heat transfer applications in the semiconductor manufacturing industry. Its liquid range (-50°C to 128°C) makes it ideal for a variety of applications such as etchers, ion implanters, testers and others. Because Fluorinert liquid FC-3283 is primarily a single compound, its composition will not shift or fractionate with time. This keeps ?uid loss to a minimum and insures that transport properties will not change with time.

Physical Properties物理化學性質(zhì)

Properties

FC-3283

Appearance外觀

無色透明

Average Molecular Weight平均分子量

521

Boiling Point (1 atm)沸點

128℃

Pour Point傾點

??50℃

Estimated Critical Temperature 高承受溫度

543 K

Estimated Critical Pressure 高承受壓力

1180000pa

Vapor Pressure蒸汽壓

1440pa

Latent Heat of Vaporization (at normal boiling point揮發(fā)潛熱

78J/g

Liquid Density液體密度

1820kg/m3

Kinematic Viscosity運動粘度

0.75 centipoise

Absolute Viscosity絕對粘度

1.8centipoise

Liquid Speci?c Heat比熱

1100 J/ kg°C

Liquid Thermal Conductivity導熱率

0.066 W/ m°C

Coef?cient of Expansion膨脹系數(shù)

0.0012 /°C

Refractive Index折光率

1.290

Water Solubility溶水能力

<7 ppm

Solubility in Water水中溶解力

<5 ppm

Ozone Depletion Potential臭氧破壞潛值

0

Dielectric Strength介電強度

43 kV, 0.1" gap

Dielectric Constant介電常數(shù)

1.89

Electrical Resistivity絕緣強度

5.0 x 10(15)ohm cm